APA
Marc J Madou, . (2012). Fundamentals of Microfabrication and Nanotechnology,Ed3. London: CRC.
Chicago
Marc J Madou, . 2012. Fundamentals of Microfabrication and Nanotechnology,Ed3. London: CRC.
Harvard
Marc J Madou, . (2012). Fundamentals of Microfabrication and Nanotechnology,Ed3. London: CRC.
MLA
Marc J Madou, . Fundamentals of Microfabrication and Nanotechnology,Ed3. London: CRC. 2012.