APA
Kazuaki Suzuki S., . (2007). Microlithography:Science and Technology,Ed2. New York: Crc Press.
Chicago
Kazuaki Suzuki Smith, . 2007. Microlithography:Science and Technology,Ed2. New York: Crc Press.
Harvard
Kazuaki Suzuki S., . (2007). Microlithography:Science and Technology,Ed2. New York: Crc Press.
MLA
Kazuaki Suzuki Smith, . Microlithography:Science and Technology,Ed2. New York: Crc Press. 2007.