APA
Saburo Nanogaki, Iti & Veno. (1998). Microlithography fundamentals in Semiconductor devices and Fabrication Technology. London: Marcel.
Chicago
Saburo Nanogaki, Iti and Veno. 1998. Microlithography fundamentals in Semiconductor devices and Fabrication Technology. London: Marcel.
Harvard
Saburo Nanogaki, Iti and Veno. (1998). Microlithography fundamentals in Semiconductor devices and Fabrication Technology. London: Marcel.
MLA
Saburo Nanogaki, Iti and Veno. Microlithography fundamentals in Semiconductor devices and Fabrication Technology. London: Marcel. 1998.