James J. Allen <br/><br/>
Micro Electro mechanical System Design 

 - London  CRC  2005 
<br/><br/><label>ISBN: </label>0000047550 
<br/><br/><label>Subjects--Topical Terms: </label><br/> Electro <br/> mechanical <br/> Micro <br/> System<br/>Design <br/>Mechanical Measurement
<br/><br/><label>Dewey Class. No.: </label>621.35