TY  - BOOK
AU  - James J. Allen
TI  - Micro Electro mechanical System Design
SN  - 0000047550
U1  - 621.35 
PY  - 2005///
CY  - London
PB  - CRC
KW  -  Electro
KW  -  mechanical
KW  -  Micro
KW  -  System
KW  - Design
KW  - Mechanical Measurement
ER  -