TY  - BOOK
AU  - Nadim Maluf
TI  - An Introduction to Microelectromechanical Systems Engineering
SN  - 0000052825
U1  - 621.381043 
PY  - 2004///
CY  - Boston
PB  - Artech House
KW  -  Introduction
KW  -  Microelectromechanical
KW  -  Systems
KW  - ELECTRONICS MEASURMENTS
KW  - Engineering
ER  -