TY  - BOOK
AU  - Campbell S.A
TI  - The Science and Engineering Microelectronic Fabrication
SN  - 0000053037
U1  - 621.3813 
PY  - 2001///
CY  - New Delhi
PB  - Oxford
KW  -  Fabrication
KW  -  Microelectronic
KW  -  Science
KW  - Engineering
KW  - Micro Electronics(621.3813)
ER  -