TY  - BOOK
AU  - Sorab K. Ghandhi
TI  - VLSI Fabrication Principles
SN  - 0000053331
U1  - 621.381042 
PY  - 2005///
CY  - New York
PB  - John wiely
KW  -  Principles
KW  -  VLSI
KW  - Electronic Devices & Circuits(621.381042)
KW  - Fabrication
ER  -