TY  - BOOK
AU  - .
TI  - MOEMS
SN  - 0000082170
U1  - 621.35 
PY  - 2010///
CY  - New Delhi
PB  - New Age
KW  -  Mechanical
KW  -  Micro
KW  -  MOEMS
KW  -  Opto
KW  -  Systems
KW  - Electro
KW  - Mechanical Measurement
ER  -