TY  - BOOK
AU  - .
TI  - MEMS and MOEMS Technology and Applications
SN  - 0000084195
U1  - 621.35 
PY  - 2000///
CY  - New Delhi
PB  - PHI
KW  -  MEMS
KW  -  MOEMS
KW  -  Technology
KW  - Applications
KW  - Mechanical Measurement
ER  -