TY  - BOOK
AU  - -
TI  - CMOS-MEMS
SN  - 0000091895
U1  - 621.381042 
PY  - 2006///
CY  - New York
PB  - Wiley
KW  - CMOS-MEMS
KW  - Electronic Devices & Circuits(621.381042)
ER  -