Marc J Madou <br/><br/>
Fundamentals of Microfabrication and Nanotechnology,Ed3 

 - 3 
 - London  CRC  2012 
 -  VOL 1 .
<br/><br/><label>ISBN: </label>0000096086 
<br/><br/><label>Subjects--Topical Terms: </label><br/> Fluidics <br/> Fundamentals <br/> Micro <br/> Microfabrication <br/> Nanotechnology <br/> Nanotechnology,Ed3 <br/> Physics <br/> Solid <br/> State <br/> Techniques<br/>Anlytiical <br/>NANOTECHNOLOGY
<br/><br/><label>Dewey Class. No.: </label>620.5