TY  - BOOK
AU  - Marc J Madou
TI  - Fundamentals of Microfabrication and Nanotechnology,Ed3
SN  - 0000096088
U1  - 620.5 
PY  - 2012///
CY  - London
PB  - CRC
KW  -  Bio-Nems
KW  -  Fundamentals
KW  -  Mems
KW  -  Microfabrication
KW  -  Nanotechnology,Ed3
KW  - Bio-Mems
KW  - NANOTECHNOLOGY
ER  -