TY  - BOOK
AU  - -
TI  - Handbook of Thin film Deposition Ed,3
SN  - 0000100385
U1  - 621.38151 
PY  - 2012///
CY  - Boston
PB  - Elsevier
KW  -  Ed,3
KW  -  film
KW  -  Handbook
KW  -  Thin
KW  - Deposition
KW  - THINFILMS
ER  -