TY  - BOOK
AU  - -
TI  - CMOS MEMS
SN  - 0000101697
U1  - 621.381042 
PY  - 2005///
CY  - New York
PB  - Wiley
KW  -  MEMS
KW  - CMOS
KW  - Electronic Devices & Circuits(621.381042)
ER  -