Tai Ran Hsu <br/><br/>
MEMS and Microsystems Design and Manufacturing 

 - New Delhi  MGH  2002 
<br/><br/><label>ISBN: </label>0000113451 
<br/><br/><label>Subjects--Topical Terms: </label><br/> Manufacturing <br/> MEMS <br/> Microsystems<br/>Design <br/>Mechanical E & C
<br/><br/><label>Dewey Class. No.: </label>621.033