TY  - BOOK
AU  - Tai Ran Hsu
TI  - MEMS and Microsystems Design and Manufacturing
SN  - 0000113451
U1  - 621.033 
PY  - 2002///
CY  - New Delhi
PB  - MGH
KW  -  Manufacturing
KW  -  MEMS
KW  -  Microsystems
KW  - Design
KW  - Mechanical E & C
ER  -