Eve Versuh <br/><br/>
Handbook of Microelectromechanical Systems 

 - New York  NY Research  2015 
<br/><br/><label>ISBN: </label>0000118270 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Handbook:of:Microelectromechanical:Systems<br/>Mechanical E & C
<br/><br/><label>Dewey Class. No.: </label>621.033