TY  - BOOK
AU  - -
TI  - MEMS/NEMS Handbook, Vol.2
SN  - 0000093513
U1  - 621.381043 
PY  - 2006///
CY  - New York
PB  - Springer
KW  -  Handbook,
KW  -  MEMS/NEMS
KW  -  Techniques
KW  -  Vol.2
KW  - ELECTRONICS MEASURMENTS
KW  - Fabrication
ER  -