TY  - BOOK
AU  - Jeffrey Lang
TI  - Multi-Wafer Rotating MEMS Machines
SN  - 9780387777474
PY  - 2014///
CY  - Germany
PB  - Springer
KW  - Multi-Wafer Rotating MEMS Machines
UR  - http://link.springer.com/book/10.1007/978-0-387-77747-4
ER  -