TY  - BOOK
AU  - Wei Gao
TI  - Precision Nanometrology
SN  - 9781849962544
PY  - 2014///
CY  - Germany
PB  - Springer
KW  - Precision Nanometrology
UR  - http://link.springer.com/book/10.1007/978-1-84996-254-4
ER  -