TY  - BOOK
AU  - Nicolae Lobontiu, Ephrahim Garcia
TI  - Mechanics of Microelectromechanical Systems
SN  - 100026
PY  - 2014///
CY  - Germany
PB  - Springer
KW  - Mechanics of Microelectromechanical Systems
UR  - http://link.springer.com/book/10.1007/b100026 
ER  -