TY  - BOOK
AU  - Whitehouse, David J.
TI  - Handbook of Surface and Nanometrology, Second Edition
SN  - 978-1-4200-8202-9
PY  - 2010///
CY  - London
PB  - CRC
KW  - Handbook of Surface and Nanometrology, Second Edition
KW  - Whitehouse, David J
UR  - https://www.taylorfrancis.com/books/mono/10.1201/b10415/handbook-surface-nanometrology-david-whitehouse?context=ubx&refId=e88adf3b-f691-4712-bd1a-2da759e9ec73
ER  -