000 00485nam a2200205Ia 4500
008 191001s9999 xx 000 0 und d
020 _a0000047550
082 _a621.35
100 _aJames J. Allen
245 0 _aMicro Electro mechanical System Design
260 _aLondon
_bCRC
_c2005
536 _aTEQIP
650 _a Electro
650 _a mechanical
650 _a Micro
650 _a System
650 _aDesign
650 _aMechanical Measurement
942 _cBK
999 _c17056
_d17056