| 000 | 00485nam a2200205Ia 4500 | ||
|---|---|---|---|
| 008 | 191002s9999 xx 000 0 und d | ||
| 020 | _a0000090992 | ||
| 082 | _a621.35 | ||
| 100 | _aSalvatore Baglio | ||
| 245 | 0 | _aScaling Issues and Design of MEMS | |
| 260 |
_aNew York _bWiley _c2007 |
||
| 536 | _aManagement | ||
| 650 | _a Issues | ||
| 650 | _a MEMS | ||
| 650 | _a Scaling | ||
| 650 | _aDesign | ||
| 650 | _aMechanical Measurement | ||
| 700 | _aSavalli | ||
| 942 | _cBK | ||
| 999 |
_c28600 _d28600 |
||