| 000 | 00586nam a2200241Ia 4500 | ||
|---|---|---|---|
| 008 | 191002s9999 xx 000 0 und d | ||
| 020 | _a0000096088 | ||
| 082 | _a620.5 | ||
| 100 | _aMarc J Madou | ||
| 245 | 0 | _aFundamentals of Microfabrication and Nanotechnology,Ed3 | |
| 250 | _a3 | ||
| 260 |
_aLondon _bCRC _c2012 |
||
| 490 | _vVOL3 | ||
| 536 | _aManagement | ||
| 650 | _a Bio-Nems | ||
| 650 | _a Fundamentals | ||
| 650 | _a Mems | ||
| 650 | _a Microfabrication | ||
| 650 | _a Nanotechnology,Ed3 | ||
| 650 | _aBio-Mems | ||
| 650 | _aNANOTECHNOLOGY | ||
| 942 | _cBK | ||
| 999 |
_c29862 _d29862 |
||