| 000 | 00467nam a2200205Ia 4500 | ||
|---|---|---|---|
| 008 | 191002s9999 xx 000 0 und d | ||
| 020 | _a0000100385 | ||
| 082 | _a621.38151 | ||
| 100 | _a- | ||
| 245 | 0 | _aHandbook of Thin film Deposition Ed,3 | |
| 260 |
_aBoston _bElsevier _c2012 |
||
| 536 | _aManagement | ||
| 650 | _a Ed,3 | ||
| 650 | _a film | ||
| 650 | _a Handbook | ||
| 650 | _a Thin | ||
| 650 | _aDeposition | ||
| 650 | _aTHINFILMS | ||
| 942 | _cBK | ||
| 999 |
_c30874 _d30874 |
||