| 000 | 00499nam a2200217Ia 4500 | ||
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| 008 | 191002s9999 xx 000 0 und d | ||
| 020 | _a0000104084 | ||
| 082 | _a621.35 | ||
| 100 | _aVijay K Varddan | ||
| 245 | 0 | _aR F Mems and their applications | |
| 260 |
_aNew Delhi _bWiley _c2003 |
||
| 536 | _aManagement | ||
| 650 | _a F | ||
| 650 | _a Mems | ||
| 650 | _a R | ||
| 650 | _aapplications | ||
| 650 | _aMechanical Measurement | ||
| 700 | _a Jose | ||
| 700 | _a Vinoy | ||
| 942 | _cBK | ||
| 999 |
_c32056 _d32056 |
||