| 000 | 00579nam a2200205Ia 4500 | ||
|---|---|---|---|
| 008 | 191002s9999 xx 000 0 und d | ||
| 020 | _a0000107103 | ||
| 082 | _a763 | ||
| 100 | _aChris Makk | ||
| 245 | 0 | _aFundamentals,Principles of Optical Lithography: The Science of microfabrication | |
| 260 |
_aNew York _bWiley _c2007 |
||
| 536 | _aManagement | ||
| 650 | _a Lithography: | ||
| 650 | _a microfabrication | ||
| 650 | _a Optical | ||
| 650 | _a Science | ||
| 650 | _aFundamentals,Principles | ||
| 650 | _aLithographic (Planographic) processes(763) | ||
| 942 | _cBK | ||
| 999 |
_c32869 _d32869 |
||