000 00483nam a2200157Ia 4500
008 191026s9999 xx 000 0 und d
020 _a9781498741347
100 _aZhou , Guangya
245 0 _aOptical MEMS, Nanophotonics, and Their Applications
260 _aLondon
_bT&F
_c2018
536 _aManagement
650 _aElectrical
650 _aOptical MEMS, Nanophotonics, and Their Applications
856 _uhttps://www.taylorfrancis.com/books/9781498741347
942 _cE_BOOK
999 _c54875
_d54875