000 00458nam a2200157Ia 4500
008 191026s9999 xx 000 0 und d
020 _a9789814303767
100 _aSom , Tapobrata
245 0 _aNanofabrication by Ion-Beam Sputtering
260 _aLondon
_bT&F
_c2013
536 _aManagement
650 _aMechanical
650 _aNanofabrication by Ion-Beam Sputtering
856 _uhttps://www.taylorfrancis.com/books/9789814303767
942 _cE_BOOK
999 _c56028
_d56028