| 000 | 00449nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 191105s9999 xx 000 0 und d | ||
| 020 | _a9780387473185 | ||
| 100 | _aReza Ghodssi, Pinyen Lin | ||
| 245 | 0 | _aMEMS Materials and Processes Handbook | |
| 260 |
_aGermany _bSpringer _c2014 |
||
| 536 | _aManagement | ||
| 650 | _aMEMS Materials and Processes Handbook | ||
| 856 | _uhttp://link.springer.com/book/10.1007/978-0-387-47318-5 | ||
| 942 | _cE_BOOK | ||
| 999 |
_c66797 _d66797 |
||