| 000 | 00517nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 191105s9999 xx 000 0 und d | ||
| 020 | _a9781461404811 | ||
| 100 | _aSimon Li, Yue Fu | ||
| 245 | 0 | _a3D TCAD Simulation for Semiconductor Processes, Devices and Optoelectronics | |
| 260 |
_aGermany _bSpringer _c2014 |
||
| 536 | _aManagement | ||
| 650 | _a3D TCAD Simulation for Semiconductor Processes, Devices and Optoelectronics | ||
| 856 | _uhttp://link.springer.com/book/10.1007/978-1-4614-0481-1 | ||
| 942 | _cE_BOOK | ||
| 999 |
_c67804 _d67804 |
||