000 00404nam a2200145Ia 4500
008 191105s9999 xx 000 0 und d
020 _a9781849962544
100 _aWei Gao
245 0 _aPrecision Nanometrology
260 _aGermany
_bSpringer
_c2014
536 _aManagement
650 _aPrecision Nanometrology
856 _uhttp://link.springer.com/book/10.1007/978-1-84996-254-4
942 _cE_BOOK
999 _c68314
_d68314