| 000 | 00401nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 200314s9999 xx 000 0 und d | ||
| 020 | _a9780824790240 | ||
| 100 | _aKazuaki Suzuki,Smith | ||
| 245 | 0 | _aMicrolithography:Science and Technology,Ed2 | |
| 250 | _a2 | ||
| 260 |
_aNew York _bCrc Press _c2007 |
||
| 536 | _aManagement | ||
| 650 | _aMicrolithography:Science and Technology,Ed2 | ||
| 942 | _cBK | ||
| 999 |
_c72052 _d72052 |
||